The HFM-301 / HFC-303 meters and controllers have flow ranges from 0-25 slm to flows of 0-1000 slm; provide analog outputs, are constructed of stainless steel and have normally closed valves. The full scale range is specified by the end user. A NIST traceable calibration certificate is standard. With a choice of elastomers and high pressure options, the HFM-301 / HFC-303 services a wide variety of applications. Cleaning for oxygen service is available.
±1% of full scale Accuracy
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Applications and Industries
- Leak Testing
- Flame Spray
- Gas Blending
- Semiconductor Process
- Thin Film Deposition
