HFM-D-300A / HFC-D-302A

All Metal, Fast Response, Tight Accuracy!

Mass 300AMass flow techniques provide reliable, repeatable and accurate gas flow rate measurements.

HFM-D-300A / HFC-D-302A mass flow instruments have flow ranges from 0-5 sccm to 0-25 slm; use all metal seals, provide analog and digital outputs, and are constructed of stainless steel. Easy, user friendly digital communications with windows based software interface available.

Self diagnostics of the sensor, valve and overflow are included in the digital features. Also of interest is the auto zero feature which detects when the valve is closed and automatically resets the zero. These mass flow meters and controllers can store up to 10 calibrations of different ranges and gases. Another feature is the built in totalizer for monitoring gas usage under user set conditions.

± (0.5% of reading + 0.2% of full scale) Accuracy

Buy from the designers, Teledyne Hastings, and experience extraordinary customer service. Let us solve your application challenges, by designing and building your flow instruments.

Applications and Industries

  • Leak Testing
  • Thin Film Deposition
  • High Purity Gas Delivery
  • Thermal Flame Spray
  • Gas Blending
  • ​Pharmaceutical Process​


HFM-D-300A Flow Meter

Range​0 - 5 sccm to 0 - 25 slm (N₂)
Accuracy± (0.5% of reading + 0.2% of full scale)
Repeatability± 0.15% of F.S.
Maximum Working Pressure500 PSIG (Optional 1000 PSIG)
Settling Time
Typically <1 seconds
Analog I/O (Standard)​​0 - 5 VDC
Analog I/O (Optional)​​0 - 10 VDC, 0 - 20 mA, 4 - 20 mA
Digital I/O (Standard)​RS-232, RS-485
Analog Connector15-pin subminiature D
​Digital ConnectorDual RJ-12
Power Requirements​11 - 36 VDC @ 3.1 Watt (max), Unipolar or Bipolar (e.g. +15 VDC, +12 VDC)
Wetted Materials​316L SS, Nickel 200, 304 SS, 302 SS

HFC-D-302A Flow Controller

Range​0 - 5 sccm to 0 - 25 slm (N₂)
Accuracy± (0.5% of reading + 0.2% of full scale)
Repeatability​± 0.15% of F.S.
Maximum Working Pressure 500 PSIG (Optional 1000 PSIG)
Settling Time
Typically <1 - 2 seconds
Analog I/O (Standard)​​0 - 5 VDC
Analog I/O (Optional)​​​​​0 - 10 VDC, 0 - 20 mA, 4 - 20 mA
Digital I/O (Standard) ​​RS-232, RS-485
Analog Connector15-pin subminiature D
Digital ConnectorDual RJ-12
Power Requirements​​​11 - 36 VDC @ 6.7 Watt (max), Unipolar or Bipolar (e.g. +15 VDC, +12 VDC)
Wetted Materials​​316L SS, Nickel 200, 302 SS, 304 SS, Kalrez® (Valve Seat)